Strained layer instabilities on vicinal surfaces: Ge 0.8Si 0.2 epitaxy on laser textured Si(001)

Fumiya Watanabe, David G. Cahill, Sukwon Hong, Joseph E. Greene

Research output: Contribution to journalArticlepeer-review

Abstract

The use of laser texturing for combinatorial studies of surface morphology was discussed. It was found that the morphologies of Ge 0.8Si 0.2 films were a rich function of substrate miscut. The size of structures was decreased with the increased growth rate due to thw suppression of coarsening at high growth rates. The results show the importance of anisotropy in surface stiffness for the formation of strained layer morphologies.

Original languageEnglish (US)
Pages (from-to)1238-1240
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number7
DOIs
StatePublished - Aug 16 2004

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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