Strain rate and creep response of Au and Ni thin films

N. Karanjgaokar, Ioannis Chasiotis, D. Peroulis, K. Jonnalagadda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Metallic films for MEMS and microelectronics are often subjected to strains near the elastic limit and over a wide spectrum of strain rates. In this study, comprehensive uniaxial tension experiments were carried out to extract the strain rate response of thin nanocrystalline Au and Ni films over eight orders of applied strain rate, i.e. 10-6 - 20 s-1. Full-field strains were obtained from MEMS-scale samples to determine their elastic and inelastic mechanical behavior. The microscale tension experiments on Au and Ni films showed monotonic increase of the elastic limit, yield stress, and ultimate strength with increasing strain rate. Furthermore, the fracture strain decreased with increasing strain rate with a sharp transition at 10-4 s-1, implying enhanced creep at rates slower than this rate. The failure of Au films was predominantly ductile with different damage mechanisms at the slow (through-thickness damage) and fast (film mid-plane damage) strain rates. In creep experiments conducted over the span of days the primary creep response was significant followed by a steady-state response, which behavior repeated itself under periodically applied fixed stress (period of one day).

Original languageEnglish (US)
Title of host publicationSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Pages2373-2381
Number of pages9
StatePublished - Dec 1 2009
EventSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 - Albuquerque, NM, United States
Duration: Jun 1 2009Jun 4 2009

Publication series

NameSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Volume4

Other

OtherSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
CountryUnited States
CityAlbuquerque, NM
Period6/1/096/4/09

ASJC Scopus subject areas

  • Computational Mechanics

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  • Cite this

    Karanjgaokar, N., Chasiotis, I., Peroulis, D., & Jonnalagadda, K. (2009). Strain rate and creep response of Au and Ni thin films. In Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 (pp. 2373-2381). (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009; Vol. 4).