Abstract
The reliability of MEMS is a key problem for its commercial application. The polysilicon microcantilever is a basic structure in MEMS. Mechanism of stiction failure of surfaces-micromachined microcantilever is introduced and a stiction reliability prediction model based on macro-mechanical theory and reliability method is presented. Finally the effect of micro-cantilever dimension and environment humidity on reliability is analyzed.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1602-1605 |
| Number of pages | 4 |
| Journal | Chinese Journal of Sensors and Actuators |
| Volume | 19 |
| Issue number | 5 |
| State | Published - Oct 2006 |
| Externally published | Yes |
Keywords
- MEMS
- Micro-cantilever
- Reliability
- Stiction failure
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
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