@inproceedings{e3f3b4014bf84a7aa7f0b6f3191e491e,
title = "Static and dynamic analysis of silicon NEMS",
abstract = "We have performed a comparative study of the accuracy of the continuum model with atomistic simulations for silicon nanoelectromechanical (NEM) switches. Using the validated continuum nonlinear elastic model, the effect of van der Waals interactions on static and dynamic pull-in are studied. We also investigated the pull-in time and the resonance frequency shift due to an applied DC bias voltage for the silicon NEM switches. Finally, we present here several results which address the key issues in the development of computational design tools and the design rules for nanoelectromechanical systems.",
keywords = "Continuum theory, Dynamic, NEMS, Pull-in, Static analysis, Van der waals interactions",
author = "Zhi Tang and Aluru, {Narayana R}",
year = "2003",
language = "English (US)",
isbn = "0972842209",
series = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
pages = "464--467",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",
}