@inproceedings{07f699fbf7fd4e8e9175bbb241a25b54,
title = "State-to-State Analysis of a Nitrogen RF Inductively Coupled Plasma",
abstract = "The present work focuses on the study of non-equilibrium effects in radio frequency inductively coupled plasmas (ICP) using state-of-the-art State-to-State model for Nitrogen plasma. A multi-physics computational framework has been developed to simulate the complex MHD phenomena inside ICPs. The fluid governing equations are discretized in space based on a cell-centered finite volume method. A preconditioned compressible formulation is adopted to tackle the stiffness resulting from low Mach numbers. Non-Local Thermodynamic Equilibrium (NLTE) calculations are performed using either multi-temperature or State-to-State models. Electromagnetic equations are solved via the mixed finite element method and coupled with the fluid solver in an explicit fashion to model NLTE ICP discharges. Calculations using vibronic State-to-State model for nitrogen plasma has been presented to show the versatility of the presented framework in modeling non-equilibrium ICPs. The State-to-State calculations show a significant deviation of the internal state populations from Boltzmann distribution giving considerably different thermal and flow fields inside the ICP torch as compared to the one obtained using conventional 2-T model.",
author = "Sanjeev Kumar and Alessandro Munaf{\`o} and Jo, {Sung Min} and Marco Panesi",
note = "Publisher Copyright: {\textcopyright} 2023, American Institute of Aeronautics and Astronautics Inc, AIAA. All rights reserved.; AIAA SciTech Forum and Exposition, 2023 ; Conference date: 23-01-2023 Through 27-01-2023",
year = "2023",
doi = "10.2514/6.2023-0570",
language = "English (US)",
isbn = "9781624106996",
series = "AIAA SciTech Forum and Exposition, 2023",
publisher = "American Institute of Aeronautics and Astronautics Inc, AIAA",
booktitle = "AIAA SciTech Forum and Exposition, 2023",
}