State-to-State Analysis of a Nitrogen RF Inductively Coupled Plasma

Sanjeev Kumar, Alessandro Munafò, Sung Min Jo, Marco Panesi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The present work focuses on the study of non-equilibrium effects in radio frequency inductively coupled plasmas (ICP) using state-of-the-art State-to-State model for Nitrogen plasma. A multi-physics computational framework has been developed to simulate the complex MHD phenomena inside ICPs. The fluid governing equations are discretized in space based on a cell-centered finite volume method. A preconditioned compressible formulation is adopted to tackle the stiffness resulting from low Mach numbers. Non-Local Thermodynamic Equilibrium (NLTE) calculations are performed using either multi-temperature or State-to-State models. Electromagnetic equations are solved via the mixed finite element method and coupled with the fluid solver in an explicit fashion to model NLTE ICP discharges. Calculations using vibronic State-to-State model for nitrogen plasma has been presented to show the versatility of the presented framework in modeling non-equilibrium ICPs. The State-to-State calculations show a significant deviation of the internal state populations from Boltzmann distribution giving considerably different thermal and flow fields inside the ICP torch as compared to the one obtained using conventional 2-T model.

Original languageEnglish (US)
Title of host publicationAIAA SciTech Forum and Exposition, 2023
PublisherAmerican Institute of Aeronautics and Astronautics Inc, AIAA
ISBN (Print)9781624106996
DOIs
StatePublished - 2023
EventAIAA SciTech Forum and Exposition, 2023 - Orlando, United States
Duration: Jan 23 2023Jan 27 2023

Publication series

NameAIAA SciTech Forum and Exposition, 2023

Conference

ConferenceAIAA SciTech Forum and Exposition, 2023
Country/TerritoryUnited States
CityOrlando
Period1/23/231/27/23

ASJC Scopus subject areas

  • Aerospace Engineering

Fingerprint

Dive into the research topics of 'State-to-State Analysis of a Nitrogen RF Inductively Coupled Plasma'. Together they form a unique fingerprint.

Cite this