Stable oscillation of mems resonators beyond the critical bifurcation point

H. K. Lee, J. C. Salvia, S. Yoneoka, G. Bahl, Y. Q. Qu, R. Melamud, S. Chandorkar, M. A. Hopcroft, B. Kim, T. W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

MEMS resonators have many useful features, but they can suffer performance limitations because of the limited linear range of motion of their micromechanical elements. Operation beyond the critical bifurcation limit is believed to cause significant instabilities and is generally discouraged [1]. However, the stability criterion for closed-loop oscillators differs from that for open-loop observation [2], thereby enabling operation of stable oscillators beyond the limit dictated by critical bifurcation. This paper describes the use of phase-controlled oscillators to prove stable operation beyond the critical bifurcation limit, which can directly improve the power handling capabilities of many micromechanical oscillators.

Original languageEnglish (US)
Title of host publication2010 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsDavid J. Monk, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages70-73
Number of pages4
ISBN (Electronic)0964002485, 9780964002487
DOIs
StatePublished - 2010
Externally publishedYes
Event2010 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 6 2010Jun 10 2010

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/TerritoryUnited States
CityHilton Head Island
Period6/6/106/10/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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