@article{1763bc36e06b48419a0ebec1893877ff,
title = "Stable microplasmas in air generated with a silicon inverted pyramid plasma cathode",
abstract = "Stable microdischarges, ∼0.5-1 mm in length, are produced in atmospheric air by extracting plasma from a (50 μm)2 inverted pyramidal Si microdischarge device which serves as a plasma cathode. Both metal and dielectric tips have been successfully tested as the extraction electrode and driving frequencies up to 20 kHz have been demonstrated. The plasma column, or conduit, generated is well behaved and essentially cylindrical with a diameter smaller than the width of the Si cathode device.",
keywords = "Atmospheric plasmas, Microdischarges, Plasma cathode",
author = "Park, {S. J.} and Eden, {J. G.}",
note = "Funding Information: Manuscript received July 2, 2004; revised December 20, 2004. This work was supported by the U.S. Air Force Office of Scientific Research (H. R. Schloss-berg) under Grant F49620-03-1-0391. The authors are with the Laboratory for Optical Physics and Engineering, the Department of Electrical and Computer Engineering, the University of Illinois, Urbana, IL 61801 USA (e-mail:
[email protected]). Digital Object Identifier 10.1109/TPS.2005.845269 Fig. 1. Schematic diagram of the experimental arrangement. The Si microdischarge device shown is that used in initial studies. In subsequent experiments, the device was overcoated with a silicon nitride film.",
year = "2005",
month = apr,
doi = "10.1109/TPS.2005.845269",
language = "English (US)",
volume = "33",
pages = "570--571",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2 I",
}