SrTiO3 thin films deposited by CLCB in combination with sol-gel processing

Hochul Kang, Sungho Park, Kyekyoon Kim, Man Y. Sung, Hyungsoo Choi

Research output: Contribution to journalArticle

Abstract

High-quality SrTiO3 thin films were deposited by charged liquid cluster beam (CLCB) method using a strontium carboxylate with a sol-gel processed Ti precursor at substrate temperatures of 400 and 500°C. The film deposited at 400°C was crystallized at 600-700°C to give a granular structure (film I) while the film deposited at 500°C (film II) gave a columnar structure of high crystallinity without postannealing. The grain growth and electric properties, such as dielectric constant, dissipation factor, leakage current density, and breakdown field, of films I and II were compared.

Original languageEnglish (US)
JournalElectrochemical and Solid-State Letters
Volume7
Issue number11
DOIs
StatePublished - Dec 17 2004

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering
  • Electrochemistry

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