Spurious-mode-free, laterally-vibrating microelectromechanical system resonators

Songbin Gong (Inventor), Yongha Song (Inventor)

Research output: Patent

Abstract

A micro-resonator includes a first electrode positioned on a piezoelectric plate at a first end of the piezoelectric plate, the first electrode including a first set of fingers and a second electrode positioned on the piezoelectric plate at a second end of the piezoelectric plate. The second electrode including a second set of fingers interdigitated with the first set of fingers with an overlapping distance without touching the first set of fingers, the overlapping distance being less than seven-tenths the length of one of the first set of fingers or the second set of fingers. At least one of the first end or the second end of the piezoelectric plate may define a curved shape.
Original languageEnglish (US)
U.S. patent number10476469
StatePublished - Nov 12 2019

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