Spectrally and temporally engineered processing using photoelectrochemistry

Chris Edwards (Inventor), Lynford L Goddard (Inventor), Gang "Logan" Liu (Inventor), Xin Yu (Inventor), Shailendra N Srivastava (Inventor), Catherine Britt Carlson (Inventor), Julianne K Lee (Inventor), Terry Koker (Inventor), Samuel P Washington (Inventor), Lonna D Edwards (Inventor), Kaiyuan Wang (Inventor)

Research output: Patent

Abstract

Methods and apparatus for subtractively fabricating three-dimensional structures relative to a surface of a substrate and for additively depositing metal and dopant atoms onto the surface and for diffusing them into the bulk. A chemical solution is applied to the surface of the semiconductor substrate, and a spatial pattern of electron-hole pairs is generated by projecting a spatial pattern of illumination characterized by a specified intensity, wavelength and duration at each pixel of a plurality of pixels on the surface. Charge carriers are driven away from the surface of the semiconductor on a timescale short compared to the carrier recombination lifetime. Such methods are applied to creating a spatially varying doping profile in the semiconductor substrate, a photonic integrated circuit and an integrated photonic microfluidic circuit.
Original languageEnglish (US)
U.S. patent number10734237
StatePublished - Aug 4 2020

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