Spectral encoding of spatial frequency approach for characterization of nanoscale structures

Sergey A. Alexandrov; Shikhar Uttam; Rajan K. Bista; Kevin Staton; Yang Liu

doi:10.1063/1.4737209

Spectral encoding of spatial frequency approach for characterization of nanoscale structures

Sergey A. Alexandrov, Shikhar Uttam, Rajan K. Bista, Kevin Staton, Yang Liu

Research output: Contribution to journal › Article › peer-review

Abstract

An approach to acquire axial structural information at nanoscale is demonstrated. It is based on spectral encoding of spatial frequency principle to reconstruct the structural information about the axial profile of the three-dimensional (3D) spatial frequency for each image point. This approach overcomes the fundamental limitations of current optical techniques and provides nanoscale accuracy and sensitivity in characterizing axial structures. Numerical simulation and experimental results are presented.

Original language	English (US)
Article number	033702
Journal	Applied Physics Letters
Volume	101
Issue number	3
DOIs	https://doi.org/10.1063/1.4737209
State	Published - Jul 16 2012
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4737209

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abstract = "An approach to acquire axial structural information at nanoscale is demonstrated. It is based on spectral encoding of spatial frequency principle to reconstruct the structural information about the axial profile of the three-dimensional (3D) spatial frequency for each image point. This approach overcomes the fundamental limitations of current optical techniques and provides nanoscale accuracy and sensitivity in characterizing axial structures. Numerical simulation and experimental results are presented.",

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AU - Liu, Yang

PY - 2012/7/16

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AB - An approach to acquire axial structural information at nanoscale is demonstrated. It is based on spectral encoding of spatial frequency principle to reconstruct the structural information about the axial profile of the three-dimensional (3D) spatial frequency for each image point. This approach overcomes the fundamental limitations of current optical techniques and provides nanoscale accuracy and sensitivity in characterizing axial structures. Numerical simulation and experimental results are presented.

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Spectral encoding of spatial frequency approach for characterization of nanoscale structures

Abstract

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