@article{544c61b10bc14042afb00fecfb286225,
title = "Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films",
abstract = "Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.",
keywords = "anisotropic properties, lorentz-force actuation, microelectromechanical systems, multimodal resonance, polymer mechanics, three-dimensional structures",
author = "Kewang Nan and Heling Wang and Xin Ning and Miller, {Kali A.} and Chen Wei and Yunpeng Liu and Haibo Li and Yeguang Xue and Zhaoqian Xie and Haiwen Luan and Yihui Zhang and Yonggang Huang and Rogers, {John A.} and Braun, {Paul V.}",
note = "Funding Information: All experimental efforts presented were supported by the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under award no. DE-FG02-07ER46471, through the Frederick Seitz Materials Research Laboratory at the University of Illinois at Urbana− Champaign. K.A.M. was supported by National Science Foundation Graduate Research Fellowship Program under grant no. DGE 1746047. Y.Z. acknowledged the support from the National Natural Science Foundation of China (11722217) and the Tsinghua National Laboratory for Information Science and Technology. Y.H. acknowledged the support from NSF (nos. CMMI1400169, CMMI1534120, and CMMI1635443). Y.X. acknowledged the support from the Ryan Fellowship and the Northwestern University International Institute for Nanotechnology. Funding Information: All experimental efforts presented were supported by the U.S. Department of Energy, Office of Basic Energy Sciences Division of Materials Sciences and Engineering under award no. DE-FG02-07ER46471 through the Frederick Seitz Materials Research Laboratory at the University of Illinois at Urbana{\^a}€{"}Champaign. K.A.M. was supported by National Science Foundation Graduate Research Fellowship Program under grant no. DGE 1746047. Y.Z. acknowledged the support from the National Natural Science Foundation of China (11722217) and the Tsinghua National Laboratory for Information Science and Technology. Y.H. acknowledged the support from NSF (nos. CMMI1400169, CMMI1534120, and CMMI1635443). Y.X. acknowledged the support from the Ryan Fellowship and the Northwestern University International Institute for Nanotechnology. Publisher Copyright: {\textcopyright} 2018 American Chemical Society.",
year = "2019",
month = jan,
day = "22",
doi = "10.1021/acsnano.8b06736",
language = "English (US)",
volume = "13",
pages = "449--457",
journal = "ACS Nano",
issn = "1936-0851",
publisher = "American Chemical Society",
number = "1",
}