Soft Lithography for Microfluidic Microelectromechanical Systems (MEMS) and Optical Devices

Svetlana M. Mitrovski, Shraddha Avasthy, Evan M. Erickson, Matthew E. Stewart, John A. Rogers, Ralph G. Nuzzo

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish (US)
Title of host publicationUnconventional Nanopatterning Techniques and Applications
PublisherJohn Wiley & Sons, Ltd.
Pages293-323
Number of pages31
ISBN (Print)9780470099575
DOIs
StatePublished - Apr 30 2008
Externally publishedYes

Keywords

  • Concentration gradients and microfluidic devices
  • MEMS and optical device soft lithography
  • Optics and microfluidics

ASJC Scopus subject areas

  • General Chemical Engineering
  • General Biochemistry, Genetics and Molecular Biology
  • General Engineering

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