Soft lithographic fabrication of an image sensor array on a curved substrate

Hyun Chul Jin, John R. Abelson, Martin K. Erhardt, Ralph G. Nuzzo

Research output: Contribution to journalReview article

Abstract

The use of soft lithography for fabricating Si:H photoconductive sensors was demonstrated on a convex glass substrate was demonstrated. It was observed that soft lithography could be used for device fabrication on non-planar substrates. It was also observed that the process including metal and semiconductor deposition was compatible with flexible plastic substrates.

Original languageEnglish (US)
Pages (from-to)2548-2551
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number5
DOIs
StatePublished - Sep 1 2004

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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