Soft lithographic fabrication of an image sensor array on a curved substrate

Hyun Chul Jin, John R Abelson, Martin K. Erhardt, Ralph G Nuzzo

Research output: Contribution to journalReview article

Abstract

The use of soft lithography for fabricating Si:H photoconductive sensors was demonstrated on a convex glass substrate was demonstrated. It was observed that soft lithography could be used for device fabrication on non-planar substrates. It was also observed that the process including metal and semiconductor deposition was compatible with flexible plastic substrates.

Original languageEnglish (US)
Pages (from-to)2548-2551
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number5
DOIs
StatePublished - Sep 1 2004

Fingerprint

Sensor arrays
Image sensors
Fabrication
Lithography
fabrication
sensors
Substrates
lithography
plastics
Semiconductor materials
Plastics
Glass
glass
Sensors
Metals
metals

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Soft lithographic fabrication of an image sensor array on a curved substrate. / Jin, Hyun Chul; Abelson, John R; Erhardt, Martin K.; Nuzzo, Ralph G.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 22, No. 5, 01.09.2004, p. 2548-2551.

Research output: Contribution to journalReview article

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