@inproceedings{128050fa0600418ea7e9b486144def57,
title = "Smart Photons from Microplasma-based UV Devices: New Opportunities in the Microelectronics, Health Care, and Micro/Nano Processing",
abstract = "Low-temperature microplasmas are efficient sources of ions, electrons, active species, and photons. In particular, Photon generation of microcavity plasma arrays offers differentiated performance in various photonics applications that were previously unavailable. In this paper, we will discuss recent developments in microplasma photonics in three areas.",
author = "Park, {S. J.} and Eden, {J. G.}",
note = "Work supported by DARPA, U.S. Office of Naval Research, and U.S. Department of Energy (DOE); 50th IEEE International Conference on Plasma Science, ICOPS 2023 ; Conference date: 21-05-2023 Through 25-05-2023",
year = "2023",
doi = "10.1109/ICOPS45740.2023.10481103",
language = "English (US)",
series = "IEEE International Conference on Plasma Science",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "ICOPS 2023 - 50th IEEE International Conference on Plasma Science",
address = "United States",
}