Smart Photons from Microplasma-based UV Devices: New Opportunities in the Microelectronics, Health Care, and Micro/Nano Processing

S. J. Park, J. G. Eden

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Low-temperature microplasmas are efficient sources of ions, electrons, active species, and photons. In particular, Photon generation of microcavity plasma arrays offers differentiated performance in various photonics applications that were previously unavailable. In this paper, we will discuss recent developments in microplasma photonics in three areas.

Original languageEnglish (US)
Title of host publicationICOPS 2023 - 50th IEEE International Conference on Plasma Science
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350302660
DOIs
StatePublished - 2023
Externally publishedYes
Event50th IEEE International Conference on Plasma Science, ICOPS 2023 - Santa Fe, United States
Duration: May 21 2023May 25 2023

Publication series

NameIEEE International Conference on Plasma Science
ISSN (Print)0730-9244

Conference

Conference50th IEEE International Conference on Plasma Science, ICOPS 2023
Country/TerritoryUnited States
CitySanta Fe
Period5/21/235/25/23

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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