SLS of Si films on polymer substrates: Materials and devices

A. B. Limanov, P. C. Van Der Wilt, M. G. Kane, A. M. Firester, L. Goodman, J. Lee, John R Abelson, James S. Im

Research output: Contribution to journalConference articlepeer-review

Abstract

A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs, In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.

Original languageEnglish (US)
Pages (from-to)491-494
Number of pages4
JournalProceedings of International Meeting on Information Display
Volume2006
StatePublished - Dec 1 2006
EventIMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of
Duration: Aug 22 2006Aug 25 2006

ASJC Scopus subject areas

  • Engineering(all)

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