SLS of Si films on polymer substrates: Materials and devices

A. B. Limanov; P. C. Van Der Wilt; M. G. Kane; A. M. Firester; L. Goodman; J. Lee; John R Abelson; James S. Im

SLS of Si films on polymer substrates: Materials and devices

A. B. Limanov, P. C. Van Der Wilt, M. G. Kane, A. M. Firester, L. Goodman, J. Lee, John R Abelson, James S. Im

Research output: Contribution to journal › Conference article › peer-review

Abstract

A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs, In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.

Original language	English (US)
Pages (from-to)	491-494
Number of pages	4
Journal	Proceedings of International Meeting on Information Display
Volume	2006
State	Published - 2006
Event	IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of Duration: Aug 22 2006 → Aug 25 2006

ASJC Scopus subject areas

General Engineering

Library availability

Discover UIUC Full Text

Cite this

@article{6ddbd7f4f5de441782c3284bd56f1605,

title = "SLS of Si films on polymer substrates: Materials and devices",

abstract = "A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs, In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.",

author = "Limanov, {A. B.} and {Van Der Wilt}, {P. C.} and Kane, {M. G.} and Firester, {A. M.} and L. Goodman and J. Lee and Abelson, {John R} and Im, {James S.}",

year = "2006",

language = "English (US)",

volume = "2006",

pages = "491--494",

journal = "Proceedings of International Meeting on Information Display",

issn = "1738-7558",

note = "IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference ; Conference date: 22-08-2006 Through 25-08-2006",

}

TY - JOUR

T1 - SLS of Si films on polymer substrates

T2 - IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference

AU - Limanov, A. B.

AU - Van Der Wilt, P. C.

AU - Kane, M. G.

AU - Firester, A. M.

AU - Goodman, L.

AU - Lee, J.

AU - Abelson, John R

AU - Im, James S.

PY - 2006

Y1 - 2006

N2 - A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs, In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.

AB - A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs, In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.

UR - http://www.scopus.com/inward/record.url?scp=33846155582&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33846155582&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:33846155582

SN - 1738-7558

VL - 2006

SP - 491

EP - 494

JO - Proceedings of International Meeting on Information Display

JF - Proceedings of International Meeting on Information Display

Y2 - 22 August 2006 through 25 August 2006

ER -

SLS of Si films on polymer substrates: Materials and devices

Abstract

ASJC Scopus subject areas

Library availability

Related links

Fingerprint

Cite this