A number of research groups and companies have succeeded in employing various SLS schemes to create low defect-density Si films on glass substrates for making high performance TFTs, In this paper, we first point out that SLS can be utilized to just as effectively handle crystallization of thin Si films on polymer substrates, and then present preliminary results on high-performance circuits that are built using the materials.
|Original language||English (US)|
|Number of pages||4|
|Journal||Proceedings of International Meeting on Information Display|
|State||Published - 2006|
|Event||IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of|
Duration: Aug 22 2006 → Aug 25 2006
ASJC Scopus subject areas