Size-Dependent Detachment-Limited Decay Kinetics of Two-Dimensional TiN Islands on TiN(111)

S. Kodambaka; V. Petrova; S. V. Khare; D. Gall; A. Rockett; I. Petrov; J. E. Greene

doi:10.1103/PhysRevLett.89.176102

Size-Dependent Detachment-Limited Decay Kinetics of Two-Dimensional TiN Islands on TiN(111)

S. Kodambaka, V. Petrova, S. V. Khare, D. Gall, A. Rockett, I. Petrov, J. E. Greene

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The decay kinetics of 2D TiN adatom and vacancy islands on highly anisotropic TiN(111) surfaces were measured using in situ high-temperature STM. There was an abrupt decrease in decay rates for adatom islands with areas A less than a critical value A_c≃1600 Å², irrespective of T_a. However, no decay rate transition was observed for vacancy islands. The coarsening/decay kinetics of both adatom and vacancy islands on TiN(111) were found to be consistent with a detachment-limited mechanism. From time- and temperature-dependent island area measurements, activation energies were obtained for TiN(111) adatom island decay of 3.3±0.4 eV (A<A_c) and 2.3±0.6 eV (A>A_c). Overall, the results provide the first evidence of a strong island size-dependence, and therefore a large anisotropy in attachment/detachment activation barriers.

Original language	English (US)
Journal	Physical review letters
Volume	89
Issue number	17
DOIs	https://doi.org/10.1103/PhysRevLett.89.176102
State	Published - 2002

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General Physics and Astronomy

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10.1103/PhysRevLett.89.176102

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@article{969d274e440d43f5b1908710670b8603,

title = "Size-Dependent Detachment-Limited Decay Kinetics of Two-Dimensional TiN Islands on TiN(111)",

abstract = "The decay kinetics of 2D TiN adatom and vacancy islands on highly anisotropic TiN(111) surfaces were measured using in situ high-temperature STM. There was an abrupt decrease in decay rates for adatom islands with areas A less than a critical value Ac≃1600 {\AA}2, irrespective of Ta. However, no decay rate transition was observed for vacancy islands. The coarsening/decay kinetics of both adatom and vacancy islands on TiN(111) were found to be consistent with a detachment-limited mechanism. From time- and temperature-dependent island area measurements, activation energies were obtained for TiN(111) adatom island decay of 3.3±0.4 eV (Ac) and 2.3±0.6 eV (A>Ac). Overall, the results provide the first evidence of a strong island size-dependence, and therefore a large anisotropy in attachment/detachment activation barriers.",

author = "S. Kodambaka and V. Petrova and Khare, {S. V.} and D. Gall and A. Rockett and I. Petrov and Greene, {J. E.}",

note = "Funding Information: The authors gratefully acknowledge the financial support of the U.S. Department of Energy (DOE), Division of Materials Science, under Contract No. DEFG02-91ER4539 through the University of Illinois Frederick Seitz Materials Research Laboratory (FS-MRL). We thank G. Ehrlich, T. L. Einstein, and N. C. Bartelt for their valuable suggestions and comments. We also appreciate the use of the facilities in the Center for Microanalysis of Materials, partially supported by DOE, at the FS-MRL.",

year = "2002",

doi = "10.1103/PhysRevLett.89.176102",

language = "English (US)",

volume = "89",

journal = "Physical review letters",

issn = "0031-9007",

publisher = "American Physical Society",

number = "17",

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T1 - Size-Dependent Detachment-Limited Decay Kinetics of Two-Dimensional TiN Islands on TiN(111)

AU - Kodambaka, S.

AU - Petrova, V.

AU - Khare, S. V.

AU - Gall, D.

AU - Rockett, A.

AU - Petrov, I.

AU - Greene, J. E.

N1 - Funding Information: The authors gratefully acknowledge the financial support of the U.S. Department of Energy (DOE), Division of Materials Science, under Contract No. DEFG02-91ER4539 through the University of Illinois Frederick Seitz Materials Research Laboratory (FS-MRL). We thank G. Ehrlich, T. L. Einstein, and N. C. Bartelt for their valuable suggestions and comments. We also appreciate the use of the facilities in the Center for Microanalysis of Materials, partially supported by DOE, at the FS-MRL.

PY - 2002

Y1 - 2002

N2 - The decay kinetics of 2D TiN adatom and vacancy islands on highly anisotropic TiN(111) surfaces were measured using in situ high-temperature STM. There was an abrupt decrease in decay rates for adatom islands with areas A less than a critical value Ac≃1600 Å2, irrespective of Ta. However, no decay rate transition was observed for vacancy islands. The coarsening/decay kinetics of both adatom and vacancy islands on TiN(111) were found to be consistent with a detachment-limited mechanism. From time- and temperature-dependent island area measurements, activation energies were obtained for TiN(111) adatom island decay of 3.3±0.4 eV (Ac) and 2.3±0.6 eV (A>Ac). Overall, the results provide the first evidence of a strong island size-dependence, and therefore a large anisotropy in attachment/detachment activation barriers.

AB - The decay kinetics of 2D TiN adatom and vacancy islands on highly anisotropic TiN(111) surfaces were measured using in situ high-temperature STM. There was an abrupt decrease in decay rates for adatom islands with areas A less than a critical value Ac≃1600 Å2, irrespective of Ta. However, no decay rate transition was observed for vacancy islands. The coarsening/decay kinetics of both adatom and vacancy islands on TiN(111) were found to be consistent with a detachment-limited mechanism. From time- and temperature-dependent island area measurements, activation energies were obtained for TiN(111) adatom island decay of 3.3±0.4 eV (Ac) and 2.3±0.6 eV (A>Ac). Overall, the results provide the first evidence of a strong island size-dependence, and therefore a large anisotropy in attachment/detachment activation barriers.

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Size-Dependent Detachment-Limited Decay Kinetics of Two-Dimensional TiN Islands on TiN(111)

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