Single virus particle mass detection using microresonators with nanoscale thickness

A. Gupta, D. Akin, R. Bashir

Research output: Contribution to journalArticlepeer-review


The microfabrication and application of arrays of silicon cantilever beams as microresonator sensors with nanoscale thickness to detect the mass of individual virus particles were presented. The frequency spectra of the cantilever beams due to thermal and ambient noise were measured using a laser Doppler vibrometer under ambient conditions. The device was found to be effective in the detection of a single vaccinia virus particle with an average mass of 9.5 fg. It was shown that these devices could be useful as components of biosensors for the detection of airborne virus particles.

Original languageEnglish (US)
Pages (from-to)1976-1978
Number of pages3
JournalApplied Physics Letters
Issue number11
StatePublished - Mar 15 2004
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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