Abstract
The microfabrication and application of arrays of silicon cantilever beams as microresonator sensors with nanoscale thickness to detect the mass of individual virus particles were presented. The frequency spectra of the cantilever beams due to thermal and ambient noise were measured using a laser Doppler vibrometer under ambient conditions. The device was found to be effective in the detection of a single vaccinia virus particle with an average mass of 9.5 fg. It was shown that these devices could be useful as components of biosensors for the detection of airborne virus particles.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1976-1978 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 84 |
| Issue number | 11 |
| DOIs | |
| State | Published - Mar 15 2004 |
| Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)