Simulation of copper nanostructure formation by coupling kinetic Monte Carlo simulation, continuum models, and the level set method

The development of a multiscale simulation model that couples multiple instances of a kinetic Monte Carlo (KMC) simulation code to a moving boundary (MB) level-set continuum simulation to simulate copper nanostructure formation is discussed. The coupled simulation follows a 'master-worker' computational paradigm. The KMC code simulates the evolution of surface shape and morphology at selected locatins on the trench. The results show that at high applied overpotentials, the flux of copper at the top of trench can be significantly larger than at the bottom of the trench.