Simulation of copper nanostructure formation by coupling kinetic Monte Carlo simulation, continuum models, and the level set method

C. Timothy O. Drews, Effendi Rusli, Yuan He, Xiaohai Li, Richard C. Alkire, Richard D. Braatz

Research output: Contribution to conferencePaperpeer-review

Abstract

The development of a multiscale simulation model that couples multiple instances of a kinetic Monte Carlo (KMC) simulation code to a moving boundary (MB) level-set continuum simulation to simulate copper nanostructure formation is discussed. The coupled simulation follows a 'master-worker' computational paradigm. The KMC code simulates the evolution of surface shape and morphology at selected locatins on the trench. The results show that at high applied overpotentials, the flux of copper at the top of trench can be significantly larger than at the bottom of the trench.

Original languageEnglish (US)
Pages10175-10178
Number of pages4
StatePublished - Dec 1 2004
Event2004 AIChE Annual Meeting - Austin, TX, United States
Duration: Nov 7 2004Nov 12 2004

Other

Other2004 AIChE Annual Meeting
Country/TerritoryUnited States
CityAustin, TX
Period11/7/0411/12/04

ASJC Scopus subject areas

  • Engineering(all)

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