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Simulation and fabrication of large-area 3D nanostructures
K. H.A. Bogart
, I. El-kady
, R. K. Grubbs
, K. Rahimian
, A. M. Sanchez
, A. R. Ellis
, M. Wiwi
, F. B. McCormick
, D. J.L. Shir
, J. A. Rogers
Materials Science and Engineering
Research output
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Keyphrases
3D Nanostructure
100%
Phase Mask
50%
Nanostructures
25%
Atomic Layer Deposition
25%
Multiple Exposures
25%
3D Structure
25%
Three-dimensional (3D)
25%
Fabrication Methods
25%
Catalyst Support
25%
Metal-metal Oxide
25%
Quasicrystals
25%
Photopolymer
25%
Cleanroom
25%
Resist Shrinkage
25%
Catalysts Data
25%
Development Cycle
25%
Fuel Cell Catalyst
25%
Photonic Sensors
25%
Data Storage
25%
Inverse Model
25%
Structure Robustness
25%
Engineering
Nanomaterial
100%
Phase Mask
40%
Photonics
20%
Dimensional Structure
20%
Photopolymer
20%
Cleanroom
20%
Atomic Layer Deposition
20%
Development Cycle
20%
Electrocatalysts
20%
Material Science
Nanostructure
100%
Metal Oxide
20%
Catalyst Support
20%
Quasicrystal
20%
Electrocatalysts
20%
Chemical Engineering
Nanostructure
100%
Atomic Layer Deposition
20%
Photopolymer
20%