@inproceedings{0d629d4fa79442eb82b431548bec5ee9,
title = "Simulation and fabrication of large-area 3D nanostructures",
abstract = "Three-dimensional (3D) nano-structures are vital for emerging technologies such as photonics, sensors, fuel cells, catalyst supports, and data storage. The Proximity-field nanoPatterning1 method generates complex 3D nanostructures using a single exposure through an elastomeric {"}phase mask{"} patterned in x, y, and z, and a single development cycle. We developed a model that predicts the phase mask required to generate a specific desired nanostructure. We have compared this inverse model with experimental 3D structures to test the validity of the simulation. We have transferred the PnP fabrication process to a class-10 commercial cleanroom and scaled-up the processed area to >2000mm2, tested photopolymer additives designed to reduce resist shrinkage, incorporated atomic layer deposition (ALD) to coat the 3D patterned resist with metals/metal-oxides improve structure robustness, and generated quasi-crystal patterned 3D nanostructures.",
keywords = "Lithography, Model, Nanostructure, Photonic, Quasicrystal",
author = "Bogart, {K. H.A.} and I. El-kady and Grubbs, {R. K.} and K. Rahimian and Sanchez, {A. M.} and Ellis, {A. R.} and M. Wiwi and McCormick, {F. B.} and Shir, {D. J.L.} and Rogers, {J. A.}",
year = "2008",
language = "English (US)",
isbn = "9781420085075",
series = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",
pages = "9--12",
booktitle = "Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008",
note = "2008 NSTI Nanotechnology Conference and Trade Show, NSTI Nanotech 2008 Joint Meeting, Nanotechnology 2008 ; Conference date: 01-06-2008 Through 05-06-2008",
}