Simulating the behavior of MEMS devices: Computational methods and needs

Stephen D. Senturia; Narayan Aluru; Jacob White

doi:10.1109/99.590854

Simulating the behavior of MEMS devices: Computational methods and needs

Stephen D. Senturia, Narayan Aluru, Jacob White

Research output: Contribution to journal › Article › peer-review

Abstract

Micromachining technologies for microelectromechanical systems (MEMS) are being developed at a fast pace to produce a wide range of MEMS products and devices, but inadequate computational and simulation tools is forcing MEMS designers to keep on relying on physical prototyping to design and optimize these micromachines. New algorithms are needed to simulate the behavior of MEMS devices and address the computational issues that hamper the development of such machines.

Original language	English (US)
Pages (from-to)	30-43
Number of pages	14
Journal	IEEE computational science & engineering
Volume	4
Issue number	1
DOIs	https://doi.org/10.1109/99.590854
State	Published - 1997
Externally published	Yes

ASJC Scopus subject areas

General Engineering

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10.1109/99.590854

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abstract = "Micromachining technologies for microelectromechanical systems (MEMS) are being developed at a fast pace to produce a wide range of MEMS products and devices, but inadequate computational and simulation tools is forcing MEMS designers to keep on relying on physical prototyping to design and optimize these micromachines. New algorithms are needed to simulate the behavior of MEMS devices and address the computational issues that hamper the development of such machines.",

author = "Senturia, {Stephen D.} and Narayan Aluru and Jacob White",

note = "Funding Information: This work was supported by the Defense Advanced Research Projects Agency under contracts N00014-91-J-1698, J-FBI-88-067, and J-FBI-92-196; by the Office of Naval Research under contract N00014-90-J-1085; by the National Science Foundation under contract MIP-8858764 A02; and by grants from Digital Equipment Corp., Hewlett-Packard, Omron, and IBM.",

year = "1997",

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PY - 1997

Y1 - 1997

N2 - Micromachining technologies for microelectromechanical systems (MEMS) are being developed at a fast pace to produce a wide range of MEMS products and devices, but inadequate computational and simulation tools is forcing MEMS designers to keep on relying on physical prototyping to design and optimize these micromachines. New algorithms are needed to simulate the behavior of MEMS devices and address the computational issues that hamper the development of such machines.

AB - Micromachining technologies for microelectromechanical systems (MEMS) are being developed at a fast pace to produce a wide range of MEMS products and devices, but inadequate computational and simulation tools is forcing MEMS designers to keep on relying on physical prototyping to design and optimize these micromachines. New algorithms are needed to simulate the behavior of MEMS devices and address the computational issues that hamper the development of such machines.

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Simulating the behavior of MEMS devices: Computational methods and needs

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