Simulating the behavior of MEMS devices: Computational methods and needs

Stephen D. Senturia, Narayan Aluru, Jacob White

Research output: Contribution to journalArticlepeer-review


Micromachining technologies for microelectromechanical systems (MEMS) are being developed at a fast pace to produce a wide range of MEMS products and devices, but inadequate computational and simulation tools is forcing MEMS designers to keep on relying on physical prototyping to design and optimize these micromachines. New algorithms are needed to simulate the behavior of MEMS devices and address the computational issues that hamper the development of such machines.

Original languageEnglish (US)
Pages (from-to)30-43
Number of pages14
JournalIEEE computational science & engineering
Issue number1
StatePublished - 1997
Externally publishedYes

ASJC Scopus subject areas

  • General Engineering


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