Silicon photonic wire circuits for on-chip optical interconnects

William M.J. Green, Fengnian Xia, Solomon Assefa, Michael J. Rooks, Lidija Sekaric, Yurii A. Vlasov

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The continued scaling of power performance in electronic hardware for high-performance computing is rapidly being limited due to the large power consumption and restricted throughput of traditional electrical interconnects. One possible solution is to replace conventional global interconnects with a CMOS compatible intra-chip optical network, based on Silicon-On-Insulator (SOI) photonic integrated circuits. While the bandwidth and power consumption advantages of SOI optical interconnects are potentially immense, ensuring the performance of chip-scale networks places stringent requirements upon the control of the manufacturing process, and its influence upon the operation of individual optical components. I will present recent work on the design, fabrication, and demonstration of various passive and electrooptic devices required for high speed optical interconnect applications, including high-order optical filters and modulators. Various aspects of the CMOS compatible fabrication process used at IBM Research for manufacturing SOI photonic wire circuits will be discussed, including waveguide loss, surface roughness, device dimensions, and microresonator frequency uniformity.

Original languageEnglish (US)
Title of host publicationAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics
StatePublished - Mar 31 2008
Externally publishedYes
EventAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics - San Jose, CA, United States
Duration: Jan 21 2008Jan 23 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics
Country/TerritoryUnited States
CitySan Jose, CA


  • Nanophotonics
  • On-chip optical interconnects
  • Photonics fabrication
  • Silicon photonics
  • Silicon-on-insulator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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