Silicon-nitride surface passivation of sub-micron silicon waveguides for low-power optical switches

Joris Van Campenhout, William M.J. Green, Solomon Assefa, Yurii A. Vlasov, Xiaoping Liu, Richard M. Osgood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We achieved a two-orders-of-magnitude improvement of free carrier lifetimes in sub-micron silicon-on-insulator waveguides by applying a stoichiometric Si3N4 coating. Such surface passivation is critical for low-power operation of carrier-injected optical switches.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2009
StatePublished - 2009
Externally publishedYes
EventConference on Lasers and Electro-Optics, CLEO 2009 - Baltimore, MD, United States
Duration: May 31 2009Jun 5 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2009
Country/TerritoryUnited States
CityBaltimore, MD
Period5/31/096/5/09

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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