Silicon-nitride surface passivation of sub-micron silicon waveguides for low-power optical switches

Joris Van Campenhout, William M.J. Green, Solomon Assefa, Yurii A. Vlasov, Xiaoping Liu, Richard M. Osgood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We achieved a two-orders-of-magnitude improvement of free carrier lifetimes in sub-micron silicon-on-insulator waveguides by applying a stoichiometric Si3N4 coating. Such surface passivation is critical for low-power operation of carrier-injected optical switches.

Original languageEnglish (US)
Title of host publication2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
PublisherIEEE Computer Society
ISBN (Print)9781557528698
DOIs
StatePublished - Jan 1 2009
Externally publishedYes
Event2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009 - Baltimore, MD, United States
Duration: Jun 2 2009Jun 4 2009

Publication series

Name2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009

Other

Other2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
CountryUnited States
CityBaltimore, MD
Period6/2/096/4/09

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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    Van Campenhout, J., Green, W. M. J., Assefa, S., Vlasov, Y. A., Liu, X., & Osgood, R. M. (2009). Silicon-nitride surface passivation of sub-micron silicon waveguides for low-power optical switches. In 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009 [5225938] (2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009). IEEE Computer Society. https://doi.org/10.1364/cleo.2009.ctubb2