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Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication
Huan Hu, Hanna Cho, Suhas Somnath, Alexander F. Vakakis, William P. King
- Mechanical Science and Engineering
- Aerospace Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Contribution to journal › Article › peer-review