Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication

Hohyun Keum, Andrew Carlson, Hailong Ning, Agustin Mihi, Jeffrey D. Eisenhaure, Paul V. Braun, John A. Rogers, Seok Kim

Research output: Contribution to journalArticlepeer-review

Abstract

We present a micromanufacturing method for constructing microsystems, which we term micro-masonry based on individual manipulation, influenced by strategies for deterministic materials assembly using advanced forms of transfer printing. Analogous to masonry in construction sites, micro-masonry consists of the preparation, manipulation, and binding of microscale units to assemble microcomponents and microsystems. In this paper, for the purpose of demonstration, we used microtipped elastomeric stamps as manipulators and built three dimensional silicon microstructures. Silicon units of varied shapes were fabricated in a suspended format on donors, retrieved, delivered, and placed on a target location on a receiver using microtipped stamps. Annealing of the assembled silicon units permanently bound them and completed the micro-masonry procedure.

Original languageEnglish (US)
Article number055018
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number5
DOIs
StatePublished - May 2012

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication'. Together they form a unique fingerprint.

Cite this