Silicon epitaxy at 230 °C by reactive dc magnetron sputtering and its in situ ellipsometry monitoring

G. F. Feng, M. Katiyar, N. Maley, J. R. Abelson

Research output: Contribution to journalArticlepeer-review

Abstract

We report epitaxial growth of silicon on Si(100) at 230 °C by reactive dc magnetron sputter deposition. Growth is monitored with in situ multiwavelength ellipsometry to determine the film microstructure. Film crystallinity depends on the partial pressure of hydrogen during deposition, and the best film is obtained with 2 mTorr H2. The films are found to have a bulk density deficit of a few percent and a low-density layer at the film-substrate interface. The microstructure is confirmed by transmission electron microscopy measurements. Infrared absorption and thermal hydrogen evolution measurements indicate that a large amount of molecular hydrogen is present at the substrate interface. We discuss the possible roles of hydrogen and particle bombardment in promoting epitaxial growth.

Original languageEnglish (US)
Pages (from-to)330-332
Number of pages3
JournalApplied Physics Letters
Volume59
Issue number3
DOIs
StatePublished - 1991

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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