SiH₄ on TiSi₂: an investigation of gas adsorption on metal-like compounds

Keyphrases

• Silane 100%
• TiSi2 100%
• Gas Adsorption 100%
• Chemical Vapor Deposition 20%
• Desorption 20%
• Co-adsorption 20%
• Electrical Conductivity 20%
• Non-metallic 20%
• Two-source 20%
• Titanium Tetrachloride 20%
• Full Width at Half Maximum 20%
• First-order 20%
• Temperature Programmed Desorption 20%
• Coverage Increase 20%
• Typical Metals 20%
• Adsorption-desorption Kinetics 20%
• Gaussian Distribution 20%
• Non-metal 20%
• Source Gas 20%
• Desorption Energy 20%
• Titanium Disilicide 20%
• Kinetic Shift 20%

Chemistry

• Desorption 100%
• Adsorption of Gases 100%
• Titanium 33%
• Chemical Vapor Deposition 33%
• Gaussian Distribution 33%
• Sorption 33%

Material Science

• Desorption 100%
• Electrical Conductivity 25%
• Chemical Vapor Deposition 25%
• Titanium 25%