SiGe-on-insulator (SGOI): Substrate preparation and MOSFET fabrication for electron mobility evaluation

Z. Y. Cheng, M. T. Currie, C. W. Leitz, G. Taraschi, A. Pitera, M. L. Lee, T. A. Langdo, J. L. Hoyt, D. A. Antoniadis, E. A. Fitzgerald

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Chemical Compounds