Short-wavelength MEMS-tunable VCSELs

Garrett D. Cole, Elaine Behymer, Tiziana C. Bond, Lynford L. Goddard

Research output: Contribution to journalArticlepeer-review


We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirror for wavelength tuning. By implementing electrostatic actuation, we demonstrate the potential for tuning rates up to 1 MHz, as well as a wide wavelength tuning range of 30 nm (767-737 nm).

Original languageEnglish (US)
Pages (from-to)16093-16103
Number of pages11
JournalOptics Express
Issue number20
StatePublished - Sep 29 2008

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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