Short wavelength bottom-emitting vertical cavity lasers fabricated using wafer bonding

K. D. Choquette; K. M. Geib; B. Roberds; H. Q. Hou; R. D. Twesten; B. E. Hammons

doi:10.1049/el:19981002

Short wavelength bottom-emitting vertical cavity lasers fabricated using wafer bonding

K. D. Choquette, K. M. Geib, B. Roberds, H. Q. Hou, R. D. Twesten, B. E. Hammons

Research output: Contribution to journal › Article › peer-review

Abstract

Selectively oxidised 850nm vertical cavity surface emitting laser diodes which emit through transparent n-type GaP and AlGaAs substrates are reported. The short wavelength bottom-emitting lasers are fabricated using a low temperature inert gas wafer fusion process. Compared to top-emitting lasers, the bottom-emitting lasers bonded to n-type AlGaAs substrates show comparable electrical characteristics, while lasers bonded to n-type GaP substrates exhibit higher series resistance and voltage.

Original language	English (US)
Pages (from-to)	1404-1405
Number of pages	2
Journal	Electronics Letters
Volume	34
Issue number	14
DOIs	https://doi.org/10.1049/el:19981002
State	Published - Jul 9 1998
Externally published	Yes

ASJC Scopus subject areas

Electrical and Electronic Engineering

Online availability

10.1049/el:19981002

Library availability

Discover UIUC Full Text

Cite this

@article{dcc2afb702fd43afb6f0e6509755e5b2,

title = "Short wavelength bottom-emitting vertical cavity lasers fabricated using wafer bonding",

abstract = "Selectively oxidised 850nm vertical cavity surface emitting laser diodes which emit through transparent n-type GaP and AlGaAs substrates are reported. The short wavelength bottom-emitting lasers are fabricated using a low temperature inert gas wafer fusion process. Compared to top-emitting lasers, the bottom-emitting lasers bonded to n-type AlGaAs substrates show comparable electrical characteristics, while lasers bonded to n-type GaP substrates exhibit higher series resistance and voltage.",

author = "Choquette, {K. D.} and Geib, {K. M.} and B. Roberds and Hou, {H. Q.} and Twesten, {R. D.} and Hammons, {B. E.}",

year = "1998",

month = jul,

day = "9",

doi = "10.1049/el:19981002",

language = "English (US)",

volume = "34",

pages = "1404--1405",

journal = "Electronics Letters",

issn = "0013-5194",

publisher = "Institution of Engineering and Technology",

number = "14",

}

TY - JOUR

T1 - Short wavelength bottom-emitting vertical cavity lasers fabricated using wafer bonding

AU - Choquette, K. D.

AU - Geib, K. M.

AU - Roberds, B.

AU - Hou, H. Q.

AU - Twesten, R. D.

AU - Hammons, B. E.

PY - 1998/7/9

Y1 - 1998/7/9

N2 - Selectively oxidised 850nm vertical cavity surface emitting laser diodes which emit through transparent n-type GaP and AlGaAs substrates are reported. The short wavelength bottom-emitting lasers are fabricated using a low temperature inert gas wafer fusion process. Compared to top-emitting lasers, the bottom-emitting lasers bonded to n-type AlGaAs substrates show comparable electrical characteristics, while lasers bonded to n-type GaP substrates exhibit higher series resistance and voltage.

AB - Selectively oxidised 850nm vertical cavity surface emitting laser diodes which emit through transparent n-type GaP and AlGaAs substrates are reported. The short wavelength bottom-emitting lasers are fabricated using a low temperature inert gas wafer fusion process. Compared to top-emitting lasers, the bottom-emitting lasers bonded to n-type AlGaAs substrates show comparable electrical characteristics, while lasers bonded to n-type GaP substrates exhibit higher series resistance and voltage.

UR - http://www.scopus.com/inward/record.url?scp=0032115383&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032115383&partnerID=8YFLogxK

U2 - 10.1049/el:19981002

DO - 10.1049/el:19981002

M3 - Article

AN - SCOPUS:0032115383

SN - 0013-5194

VL - 34

SP - 1404

EP - 1405

JO - Electronics Letters

JF - Electronics Letters

IS - 14

ER -

Short wavelength bottom-emitting vertical cavity lasers fabricated using wafer bonding

Abstract

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this