@inproceedings{c6ff6201fa8a4b0e877648aa8b9c95bc,
title = "Sequential lateral solidification of Si films on polymer substrates",
abstract = "We have previously demonstrated how sequential lateral solidification (SLS) can be applied in order to create low defect-density Si films on glass substrates. In this paper, we report on recent experimental activities regarding the implementation of SLS to directly crystallize Si films on polymer substrates. In short, we demonstrate that it is certainly possible to crystallize thin Si films on polymer substrates using the technique.",
author = "Limanov, {Alex B.} and {Van Der Wilt}, {Paul C.} and Choi, {Jae Beom} and Nagi Maley and Jaeseob Lee and Abelson, {John R} and Kane, {Michael G.} and Firester, {Arthur H.} and Im, {James S.}",
year = "2005",
language = "English (US)",
isbn = "9572852221",
series = "International Display Manufacturing Conference and Exhibition, IDMC'05",
pages = "153--154",
editor = "{David Shieh}, H.P. and F.C. Chen",
booktitle = "Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05",
note = "International Display Manufacturing Conference and Exhibition, IDMC'05 ; Conference date: 21-02-2005 Through 24-02-2005",
}