Sequential lateral solidification of Si films on polymer substrates

Alex B. Limanov, Paul C. Van Der Wilt, Jae Beom Choi, Nagi Maley, Jaeseob Lee, John R Abelson, Michael G. Kane, Arthur H. Firester, James S. Im

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have previously demonstrated how sequential lateral solidification (SLS) can be applied in order to create low defect-density Si films on glass substrates. In this paper, we report on recent experimental activities regarding the implementation of SLS to directly crystallize Si films on polymer substrates. In short, we demonstrate that it is certainly possible to crystallize thin Si films on polymer substrates using the technique.

Original languageEnglish (US)
Title of host publicationProceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05
EditorsH.P. David Shieh, F.C. Chen
Pages153-154
Number of pages2
StatePublished - Dec 1 2005
EventInternational Display Manufacturing Conference and Exhibition, IDMC'05 - Taipei, Japan
Duration: Feb 21 2005Feb 24 2005

Publication series

NameInternational Display Manufacturing Conference and Exhibition, IDMC'05

Other

OtherInternational Display Manufacturing Conference and Exhibition, IDMC'05
CountryJapan
CityTaipei
Period2/21/052/24/05

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Limanov, A. B., Van Der Wilt, P. C., Choi, J. B., Maley, N., Lee, J., Abelson, J. R., Kane, M. G., Firester, A. H., & Im, J. S. (2005). Sequential lateral solidification of Si films on polymer substrates. In H. P. David Shieh, & F. C. Chen (Eds.), Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05 (pp. 153-154). (International Display Manufacturing Conference and Exhibition, IDMC'05).