Sensor for monitoring material deposition

Chang Liu

Sensor for monitoring material deposition

Chang Liu (Inventor)

Research output: Patent

Abstract

A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.

Original language	English (US)
U.S. patent number	7445675
Filing date	1/31/05
State	Published - Nov 4 2008

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title = "Sensor for monitoring material deposition",

abstract = "A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.",

author = "Chang Liu",

year = "2008",

month = nov,

day = "4",

language = "English (US)",

type = "Patent",

note = "7445675",

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PY - 2008/11/4

Y1 - 2008/11/4

N2 - A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.

AB - A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.

M3 - Patent

M1 - 7445675

Y2 - 2005/01/31

ER -

Sensor for monitoring material deposition

Abstract

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