Sensor for monitoring material deposition

Chang Liu (Inventor)

Research output: Patent

Abstract

A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.
Original languageEnglish (US)
U.S. patent number7445675
Filing date1/31/05
StatePublished - Nov 4 2008

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