Sensor chip and apparatus for tactile and/or flow sensing

Chang Liu (Inventor), Jack Chen (Inventor), Jonathan Engel (Inventor)

Research output: Patent


A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
Original languageEnglish (US)
U.S. patent number7357035
StatePublished - Apr 15 2008


Dive into the research topics of 'Sensor chip and apparatus for tactile and/or flow sensing'. Together they form a unique fingerprint.

Cite this