Abstract
A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
Original language | English (US) |
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U.S. patent number | 7357035 |
Filing date | 6/4/04 |
State | Published - Apr 15 2008 |