Abstract
A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
| Original language | English (US) |
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| U.S. patent number | 7516671 |
| State | Published - Apr 14 2009 |