Sensor chip and apparatus for tactile and/or flow sensing

Jonathan Engel (Inventor), Nannan I Chen (Inventor), Jack Chen (Inventor), Chang Liu (Inventor)

Research output: Patent


A sensor chip, comprising a flexible, polymer-based substrate, and at least one microfabricated sensor disposed on the substrate and including a conductive element. The at least one sensor comprises at least one of a tactile sensor and a flow sensor. Other embodiments of the present invention include sensors and/or multi-modal sensor nodes.
Original languageEnglish (US)
U.S. patent number7516671
Filing date2/22/07
StatePublished - Apr 14 2009


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