Sensing Sub-10 nm Wide Perturbations in Background Nanopatterns Using Optical Pseudoelectrodynamics Microscopy (OPEM)

Jinlong Zhu, Yanan Liu, Xin Yu, Renjie Zhou, Jian Ming Jin, Lynford L. Goddard

Research output: Contribution to journalArticle

Abstract

Using light as a probe to investigate perturbations with deep subwavelength dimensions in large-scale wafers is challenging because of the diffraction limit and the weak Rayleigh scattering. In this Letter, we report on a nondestructive noninterference far-field imaging method, which is built upon electrodynamic principles (mechanical work and force) of the light-matter interaction, rather than the intrinsic properties of light. We demonstrate sensing of nanoscale perturbations with sub-10 nm features in semiconductor nanopatterns. This framework is implemented using a visible-light bright-field microscope with a broadband source and a through-focus scanning apparatus. This work creates a new paradigm for exploring light-matter interactions at the nanoscale using microscopy that can potentially be extended to many other problems, for example, bioimaging, material analysis, and nanometrology.

Original languageEnglish (US)
Pages (from-to)5347-5355
Number of pages9
JournalNano letters
Volume19
Issue number8
DOIs
StatePublished - Aug 14 2019

Fingerprint

Optical microscopy
microscopy
perturbation
Rayleigh scattering
Electrodynamics
electrodynamics
Light sources
far fields
Microscopic examination
Microscopes
Diffraction
microscopes
interactions
wafers
Semiconductor materials
broadband
Scanning
Imaging techniques
scanning
probes

Keywords

  • Nanoscale sensing
  • defect inspection
  • electrodynamics
  • nanotechnology
  • optical microscopy
  • semiconductors

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

Cite this

Sensing Sub-10 nm Wide Perturbations in Background Nanopatterns Using Optical Pseudoelectrodynamics Microscopy (OPEM). / Zhu, Jinlong; Liu, Yanan; Yu, Xin; Zhou, Renjie; Jin, Jian Ming; Goddard, Lynford L.

In: Nano letters, Vol. 19, No. 8, 14.08.2019, p. 5347-5355.

Research output: Contribution to journalArticle

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