SENSELET++: A Low-cost Internet of Things Sensing Platform for Academic Cleanrooms

Beitong Tian, Zhe Yang, Hessam Moeini, Ragini Gupta, Patrick Su, Robert Kaufman, Mark McCollum, John Dallesasse, Klara Nahrstedt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Sensory IoT (Internet of Things) networks are widely applied and studied in recent years and have demonstrated their unique benefits in various areas. In this paper, we bring the sensor network to an application scenario that has rarely been studied - the academic cleanrooms. We design SENSELET++, a low-cost IoT sensing platform that can collect, manage and analyze a large amount of sensory data from heterogeneous sensors. Furthermore, we design a novel hybrid anomaly detection framework which can detect both time-critical and complex non-critical anomalies. We validate SENSELET++ through the deployment of the sensing platform in a lithography cleanroom. Our results show the scalability, flexibility, and reliability properties of the system design. Also, using real-world sensory data collected by SENSELET++, our system can analyze data streams in real-time and detect shape and trend anomalies with a 91% true positive rate.

Original languageEnglish (US)
Title of host publicationProceedings - 2021 IEEE 18th International Conference on Mobile Ad Hoc and Smart Systems, MASS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages90-98
Number of pages9
ISBN (Electronic)9781665449359
DOIs
StatePublished - 2021
Event18th IEEE International Conference on Mobile Ad Hoc and Smart Systems, MASS 2021 - Virtual, Online, United States
Duration: Oct 4 2021Oct 7 2021

Publication series

NameProceedings - 2021 IEEE 18th International Conference on Mobile Ad Hoc and Smart Systems, MASS 2021

Conference

Conference18th IEEE International Conference on Mobile Ad Hoc and Smart Systems, MASS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period10/4/2110/7/21

Keywords

  • Anomaly Detection
  • Internet of Things
  • Sensor Network

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Hardware and Architecture

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