Abstract
NULL
| Original language | English (US) |
|---|---|
| U.S. patent number | 4707216 |
| Filing date | 1/24/86 |
| State | Published - Nov 17 1987 |
Semiconductor deposition method and device
Hadis Morkoc (Inventor), Russ Fischer (Inventor)
Research output: Patent
Hadis Morkoc (Inventor), Russ Fischer (Inventor)
Research output: Patent
| Original language | English (US) |
|---|---|
| U.S. patent number | 4707216 |
| Filing date | 1/24/86 |
| State | Published - Nov 17 1987 |