Keyphrases
3D Architecture
100%
Nitrides
100%
Self-rolled-up
100%
Higher Differential
100%
Differential Stress
100%
SiNx
37%
Three-dimensional (3D)
25%
Microtube
25%
Micro-electro-mechanical Systems
25%
Magnetron Sputtering
25%
Aluminum Nitride Thin Film
25%
Optical Properties
12%
Single Crystal
12%
Ultrathin
12%
Molecular Beam Epitaxy
12%
Strain-induced
12%
Systems Approach
12%
Thermal Properties
12%
Silicon Nitride
12%
Intrinsic Stress
12%
Helical Structures
12%
Finite Element
12%
Thermal Stability
12%
Mechanical Properties
12%
High-speed Applications
12%
Complementary Metal Oxide Semiconductor
12%
Rolled-up
12%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
12%
High Young's Modulus
12%
Piezoelectric Properties
12%
Electronic Components
12%
Membrane Shell
12%
Shell Material
12%
Piezoelectric Devices
12%
Membrane Thickness
12%
Bilayer Lipid Membrane
12%
Membrane Method
12%
Structural Flexibility
12%
Structural Controllability
12%
Membrane Stress
12%
Stress Uniformity
12%
Material Science
Aluminum Nitride
100%
Thin Films
30%
Microelectromechanical System
20%
Finite Element Method
10%
Optical Property
10%
Molecular Beam Epitaxy
10%
Thermal Property
10%
Piezoelectricity
10%
Thermal Stability
10%
Young's Modulus
10%
Magnetron Sputtering
10%
Silicon Nitride
10%
Complementary Metal-Oxide-Semiconductor Device
10%
Piezoelectric Property
10%
Electronic Component
10%
Single Crystal
10%