Self-heating in piezoresistive cantilevers

Joseph C. Doll; Elise A. Corbin; William P. King; Beth L. Pruitt

doi:10.1063/1.3595485

Self-heating in piezoresistive cantilevers

Joseph C. Doll, Elise A. Corbin, William P. King, Beth L. Pruitt

Research output: Contribution to journal › Article › peer-review

Abstract

We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.

Original language	English (US)
Article number	223103
Journal	Applied Physics Letters
Volume	98
Issue number	22
DOIs	https://doi.org/10.1063/1.3595485
State	Published - May 30 2011

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.3595485

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abstract = "We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.",

author = "Doll, {Joseph C.} and Corbin, {Elise A.} and King, {William P.} and Pruitt, {Beth L.}",

note = "Funding Information: Fabrication work was performed in part at the Stanford Nanofabrication Facility (NSF under Grant No. ECS-9731293). This work was supported by the NIH (Grant No. EB006745-01A1), DARPA (Grant No. N66001-09-1-2089), and the NSF (Grant Nos. ECCS-0832819, PHY-0425897, and ECS-0449400). J.C.D. was supported in part by NDSEG and NSF fellowships. The optimization and thermal modeling code presented in this paper are available at http://microsystems.stanford.edu/piezoD.",

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AB - We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.

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Self-heating in piezoresistive cantilevers

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