Self-calibration of a dual-actuated single-axis nanopositioner using measurement transitivity with extensions to calibration of two-axis systems

Young Hun Jeong, Jingyan Dong, Placid P. Ferreira

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we discuss a self-calibration technique for a dual-actuated, single-axis nanopositioner and extend ideas from this method to develop a calibration technique for a two-axis system. The proposed methods exploit concepts of measurement transitivity and redundancy that are will established in self-calibration theory. The developed method has been applied to a dual-actuated single-axis nanopositioner equipped with capacitive displacement sensors with a calibration error in the sub-nanometer range. For the two-axis system, the technique uses a right angle prism as an artifact to calibrate two orthogonal axes. Transitivity between the axes is obtained through the use of a redundant or 'dummy' uncalibrated sensor that maintains the hypotenuse of the right angle prism invariant during sets of measurements. Because, the approach relies on the accuracy of the prism, it cannot be considered to be a self-calibration technique. Nevertheless, experiments indicate that it calibrates a two-axis stage to within 1 nm of the prism.

Original languageEnglish (US)
Title of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing II
DOIs
StatePublished - Nov 21 2008
EventInstrumentation, Metrology, and Standards for Nanomanufacturing II - San Diego, CA, United States
Duration: Aug 10 2008Aug 10 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7042
ISSN (Print)0277-786X

Other

OtherInstrumentation, Metrology, and Standards for Nanomanufacturing II
Country/TerritoryUnited States
CitySan Diego, CA
Period8/10/088/10/08

Keywords

  • Auto-calibration
  • Flexure stage
  • Machine-tool calibration
  • Metrology
  • Nanopositioning
  • Position sensing
  • Positioning error
  • Self-calibration

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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