Self-assembly templates by selective plasma surface modification of micropatterned photoresist

Jeonggi Seo, Elif Ertekin, Michael S. Pio, Luke P. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Self-assembly templates, consisting of micro-patterned hydrophobic and hydrophilic regions, are fabricated using a plasma surface modification technique. With exposure to O2 plasma, photoresist, silicon, and glass can be modified to hydrophilic surfaces. When followed by SF6 or CF4 plasma, the surface of photoresist can be modified to hydrophobic while silicon and glass surfaces are not affected. The difference in surface energy between the hydrophilic and hydrophobic regions is large, as indicated by the differential contact angle of 120° between the two regions for wetting with water. Photonic crystals are made from colloidal solutions and protein patterning is demonstrated using self-assembly templates made by selective plasma surface modification. The maximized surface energy difference between substrate and template patterning allows an ideal self-assembly of photonic crystals and selective attachment of proteins.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages192-195
Number of pages4
StatePublished - 2002
Externally publishedYes
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: Jan 20 2002Jan 24 2002

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period1/20/021/24/02

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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