Self-assembled microactuated XYZ stages for optical scanning and alignment

Keyphrases

• Optical Scanning 100%
• Optical Alignment 100%
• Surface Micromachining 50%
• Large Displacement 50%
• Positioning Accuracy 50%
• Electric Bias 50%
• Lateral Scanning 50%
• Fine Positioning 50%
• Two-dimensional Scanning 50%
• Vertical Scanning 50%
• Dynamic Focusing 50%
• Fresnel Lens 50%
• Focus Adjustment 50%
• Scratch Drive Actuator 50%
• Micro-optical Bench 50%

Engineering

• Two Dimensional 100%

Earth and Planetary Sciences

• Actuator 100%