Abstract
A novel self-assembled, surface-micromachined micro-XYZ stage with large displacements and fine positioning accuracy has been demonstrated on Si micro-optical bench for optical scanning/alignment applications. Continuous lateral scanning up to 120 μm and vertical scanning up to 250 μm have been achieved with integrated scratch drive actuators (SDA), which have step resolutions of 27 nm. The XYZ stage can be fully assembled by applying electric bias only. Focus adjustment of the micro-Fresnel lens integrated on the micro-XYZ stage has also been successfully demonstrated. They are useful for two-dimensional scanning, dynamic focusing/tracking, and fine optical alignment.
| Original language | English (US) |
|---|---|
| Pages | 319-322 |
| Number of pages | 4 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA Duration: Jun 16 1997 → Jun 19 1997 |
Other
| Other | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) |
|---|---|
| City | Chicago, IL, USA |
| Period | 6/16/97 → 6/19/97 |
ASJC Scopus subject areas
- Engineering(all)