Self-assembled microactuated XYZ stages for optical scanning and alignment

Li Fan, Ming C. Wu, Kent D. Choquette, Mary H. Crawford

Research output: Contribution to conferencePaper

Abstract

A novel self-assembled, surface-micromachined micro-XYZ stage with large displacements and fine positioning accuracy has been demonstrated on Si micro-optical bench for optical scanning/alignment applications. Continuous lateral scanning up to 120 μm and vertical scanning up to 250 μm have been achieved with integrated scratch drive actuators (SDA), which have step resolutions of 27 nm. The XYZ stage can be fully assembled by applying electric bias only. Focus adjustment of the micro-Fresnel lens integrated on the micro-XYZ stage has also been successfully demonstrated. They are useful for two-dimensional scanning, dynamic focusing/tracking, and fine optical alignment.

Original languageEnglish (US)
Pages319-322
Number of pages4
StatePublished - 1997
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
Duration: Jun 16 1997Jun 19 1997

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
CityChicago, IL, USA
Period6/16/976/19/97

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Self-assembled microactuated XYZ stages for optical scanning and alignment'. Together they form a unique fingerprint.

  • Cite this

    Fan, L., Wu, M. C., Choquette, K. D., & Crawford, M. H. (1997). Self-assembled microactuated XYZ stages for optical scanning and alignment. 319-322. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), Chicago, IL, USA, .