Self-assembled electrodes for microcavity plasma arrays: Discharge properties of large scale arrays and device fabrication by wet chemical processing

S. J. Park, K. S. Kim, A. J. Price, T. L. Kim, J. G. Eden, K. D. Kang, W. J. Yi

Research output: Contribution to conferencePaperpeer-review

Abstract

Self-assembled, linearly interconnected microcavity plasma electrodes have been fabricated by wet chemical processes. Dielectric encapsulated aluminum microcavity electrodes having emissive cavities with a diameter of 50-200 μm are formed and fabricated to yield large scale arrays. This presentation reports device structures and cell designs for high pressure Xe microplasmas.

Original languageEnglish (US)
Pages827-830
Number of pages4
StatePublished - 2007
Event14th International Display Workshops, IDW '07 - Sapporo, Japan
Duration: Dec 5 2007Dec 5 2007

Other

Other14th International Display Workshops, IDW '07
Country/TerritoryJapan
CitySapporo
Period12/5/0712/5/07

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging
  • Atomic and Molecular Physics, and Optics

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