Abstract
Self-assembled, linearly interconnected microcavity plasma electrodes have been fabricated by wet chemical processes. Dielectric encapsulated aluminum microcavity electrodes having emissive cavities with a diameter of 50-200 μm are formed and fabricated to yield large scale arrays. This presentation reports device structures and cell designs for high pressure Xe microplasmas.
Original language | English (US) |
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Pages | 827-830 |
Number of pages | 4 |
State | Published - 2007 |
Event | 14th International Display Workshops, IDW '07 - Sapporo, Japan Duration: Dec 5 2007 → Dec 5 2007 |
Other
Other | 14th International Display Workshops, IDW '07 |
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Country/Territory | Japan |
City | Sapporo |
Period | 12/5/07 → 12/5/07 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Radiology Nuclear Medicine and imaging
- Atomic and Molecular Physics, and Optics