Abstract
Monolithic oxide-confined vertical-cavity surface emitting lasers (VCSELs) not only demonstrate benchmark records, but also exhibit reproducible and wavelength insensitive performance levels which are attractive for potential applications. In this work, a reproducible and high yield selective oxidation process is are attractive for potential applications. In this work, a reproducible and high yield selective oxidation process is developed for fabrication of robust VCSELs. Moreover, selectively oxidized VCSELs are fabricated at emission wavelengths of 980, 859, and 650 nm, which indicates the universality of this VCSEL structure. High performance oxide-confined VCSELs appropriate for a variety of wavelengths should benefit emerging applications and markets considered for VCSELs.
Original language | English (US) |
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Pages (from-to) | 412-413 |
Number of pages | 2 |
Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
Volume | 2 |
State | Published - 1995 |
Externally published | Yes |
Event | Proceedings of the 1995 8th Annual Meeting of the IEEE Lasers and Electro-Optics Society. Part 1 (of 2) - San Francisco, CA, USA Duration: Oct 30 1995 → Nov 2 1995 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering