Selectively oxidized vertical-cavity lasers

Kent D. Choquette, K. L. Lear, R. P. Schneider, K. M. Geib, H. C. Chui

Research output: Contribution to journalConference article

Abstract

Monolithic oxide-confined vertical-cavity surface emitting lasers (VCSELs) not only demonstrate benchmark records, but also exhibit reproducible and wavelength insensitive performance levels which are attractive for potential applications. In this work, a reproducible and high yield selective oxidation process is are attractive for potential applications. In this work, a reproducible and high yield selective oxidation process is developed for fabrication of robust VCSELs. Moreover, selectively oxidized VCSELs are fabricated at emission wavelengths of 980, 859, and 650 nm, which indicates the universality of this VCSEL structure. High performance oxide-confined VCSELs appropriate for a variety of wavelengths should benefit emerging applications and markets considered for VCSELs.

Original languageEnglish (US)
Pages (from-to)412-413
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume2
StatePublished - Dec 1 1995
Externally publishedYes
EventProceedings of the 1995 8th Annual Meeting of the IEEE Lasers and Electro-Optics Society. Part 1 (of 2) - San Francisco, CA, USA
Duration: Oct 30 1995Nov 2 1995

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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