Semiconductor based field effect sensing of biomolecules has been shown to be a promising technology for biomedical diagnostics applications ,,. However, current devices can not be fabricated in large quantities, devices can not be functionalized individually, and sensors are prone to false positives due to non-specific binding of analytes. We demonstrate the fabrication of silicon field effect devices utilizing conventional microfabrication techniques, which is amenable for large scale fabrication and integration with existing platforms. More importantly, we demonstrate heating of individual devices as a part of a technique for individual functionalization of devices in a dense array. Our results illuminate the feasibility of using heating in order to individually functionalize nanosensors integrated in a dense array, as well as the possibility of filtering out non-specifically bound species by exploiting the differences in the temperature dependent binding kinetics of the analyte molecules.