Selective area growth and characterization of AlGaN/GaN heterojunction bipolar transistors by metalorganic chemical vapor deposition

Bryan S. Shelton, Damien J.H. Lambert, Jian Jang Huang, Michael M. Wong, Uttiya Chowdhury, Ting Gang Zhu, H. K. Kwon, Z. Liliental-Weber, M. Benarama, Milton Feng, Russell D. Dupuis

Research output: Contribution to journalArticlepeer-review

Abstract

The selective area growth (SAG) and properties of AlGaN/GaN heterojunction bipolar transistors (HBTs) grown by low-pressure metalorganic chemical vapor deposition (MOCVD) are described and analyzed. Transistors based on group III-nitride material are attractive for high-power and high-temperature applications. Much work has been focused on improving p-type material, as well as heterojunction interfaces. However, there have been very few reports on HBTs operating at room temperature. At this time, current gains for nitride-based HBTs have been limited to ∼ 10. Selective area regrowth was applied to the growth of AlGaN/GaN HBTs to analyze its potential advantages as compared to more traditional growth techniques in order to realize improved electrical performance of the devices.

Original languageEnglish (US)
Pages (from-to)490-494
Number of pages5
JournalIEEE Transactions on Electron Devices
Volume48
Issue number3
DOIs
StatePublished - Mar 2001

Keywords

  • Aluminum gallium nitride
  • Heterojunction bipolar transistor
  • Regrowth
  • Selective area growth

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Selective area growth and characterization of AlGaN/GaN heterojunction bipolar transistors by metalorganic chemical vapor deposition'. Together they form a unique fingerprint.

Cite this